Inventor · disambiguated record
Shu Nakajima
Also filed as: NAKAJIMA SHU
24 granted patents·12 pending applications·439 citations·filing 1987–2025
95Inventor score
Files withTOYOTA MOTOR CO LTD18LAM RES CORP13NISHIDA TAKUMASA2FUJI PHOTO FILM CO LTD1SUMITOMO HEAVY INDUSTRIES1
Top patents by PatentIndex Score
36 records- 0196US6483690B1Ceramic electrostatic chuck assembly and method of makingLAM RES CORP·Filed 2001·Granted Nov 19, 2002·155 cites·32 claims
- 0291US6452775B1Electrostatic chuck and method for manufacturing the sameLAM RES CORP·Filed 2000·Granted Sep 17, 2002·62 cites·15 claims
- 0391US6422173B1Apparatus and methods for actively controlling RF peak-to-peak voltage in an inductively coupled plasma etching systemLAM RES CORP·Filed 2000·Granted Jul 23, 2002·36 cites·17 claims
- 0488US4786359AXenon enhanced plasma etchTEGAL CORP·Filed 1987·Granted Nov 22, 1988·87 cites·5 claims
- 0587US2025346119A1Display control device for vehicle, display method for vehicle, and storage mediumTOYOTA MOTOR CO LTD·Filed 2025·Application pending·0 cites
- 0685US6531030B1Inductively coupled plasma etching apparatusLAM RES CORP·Filed 2000·Granted Mar 11, 2003·23 cites·16 claims
- 0784US11928288B2Operation input device, operation input method, and non-transitory computer-readable medium storing operation input programTOYOTA MOTOR CO LTD·Filed 2022·Granted Mar 12, 2024·1 cites·10 claims
- 0884US8216421B2Plasma stabilization method and plasma apparatusNISHIDA TAKUMASA·Filed 2007·Granted Jul 10, 2012·8 cites·9 claims
- 0981US2024399864A1Vehicle operation input device, vehicle operation input method, non-transitory recording mediumTOYOTA MOTOR CO LTD·Filed 2024·Application pending·0 cites
- 1080US2025264975A1Display control device, display control method and display control programTOYOTA MOTOR CO LTD·Filed 2025·Application pending·0 cites
- 1177US12263734B2Vehicle input device, vehicle input method, and non-transitory storage medium stored with vehicle input programTOYOTA MOTOR CO LTD·Filed 2023·Granted Apr 1, 2025·0 cites·20 claims
- 1277US12227072B2Display control device for vehicle, display method for vehicle, and storage mediumTOYOTA MOTOR CO LTD·Filed 2023·Granted Feb 18, 2025·0 cites·13 claims
- 1377US2025196634A1Vehicle input device, vehicle input method, and non-transitory storage medium stored with vehicle input programTOYOTA MOTOR CO LTD·Filed 2025·Application pending·0 cites
- 1476US7288156B2Methods for cleaning a substrateLAM RES CORP·Filed 2006·Granted Oct 30, 2007·5 cites·16 claims
- 1576US2024184402A1Operation input device, operation input method, and non-transitory computer-readable medium storing operation input programTOYOTA MOTOR CO LTD·Filed 2024·Application pending·0 cites
- 1675US12097763B2Vehicle operation input device, vehicle operation input method, non-transitory recording mediumTOYOTA MOTOR CO LTD·Filed 2022·Granted Sep 24, 2024·0 cites·12 claims
- 1771US8691048B2Plasma stabilization method and plasma apparatusNISHIDA TAKUMASA·Filed 2012·Granted Apr 8, 2014·2 cites·8 claims
- 1871US7320941B2Plasma stabilization method and plasma apparatusLAM RES CORP·Filed 2003·Granted Jan 22, 2008·7 cites·15 claims
- 1970US12165642B2Vehicle-mounted device operation systemTOYOTA MOTOR CO LTD·Filed 2022·Granted Dec 10, 2024·0 cites·17 claims
- 2069US7004181B2Apparatus for cleaning a substrateLAM RES CORP·Filed 2002·Granted Feb 28, 2006·12 cites·18 claims
- 2167US2025318040A1Particle beam apparatus, calculation device for transport route adjustment, and method for manufacturing particle beam apparatusSUMITOMO HEAVY INDUSTRIES·Filed 2025·Application pending·0 cites
- 2266US12321565B2Display control device, display control method and display control programTOYOTA MOTOR CO LTD·Filed 2021·Granted Jun 3, 2025·0 cites·17 claims
- 2366US11787289B2Vehicle input device, vehicle input method, and non-transitory storage medium stored with vehicle input programTOYOTA MOTOR CO LTD·Filed 2020·Granted Oct 17, 2023·0 cites·16 claims
- 2465US12045436B2Display control device for vehicle, display method for vehicle, and non-transitory recording medium for vehicleTOYOTA MOTOR CO LTD·Filed 2023·Granted Jul 23, 2024·0 cites·8 claims
- 2563US6992876B1Electrostatic chuck and its manufacturing methodLAM RES CORP·Filed 1999·Granted Jan 31, 2006·27 cites·13 claims
- 2662US6368452B1Plasma treatment apparatus and method of semiconductor processingLAM RES CORP·Filed 2000·Granted Apr 9, 2002·8 cites·20 claims
- 2761US11393469B2Vehicle-mounted device operation systemTOYOTA MOTOR CO LTD·Filed 2019·Granted Jul 19, 2022·0 cites·19 claims
- 2859US11630539B2Input accepting device, input accepting method, and non-transitory storage mediumTOYOTA MOTOR CO LTD·Filed 2022·Granted Apr 18, 2023·0 cites·17 claims
- 2957US9824863B2Plasma stabilization method and plasma apparatusLAM RES CORP·Filed 2014·Granted Nov 21, 2017·0 cites·13 claims
- 3053US2023347965A1Operation control device, operation device, steering device, vehicle, operation control method, and storage mediumTOYOTA MOTOR CO LTD·Filed 2023·Application pending·0 cites
- 3152US2024025254A1Display control device for vehicle, display method for vehicle, and non-transitory recording medium for vehicleTOYOTA MOTOR CO LTD·Filed 2023·Application pending·0 cites
- 3250US2023054581A1Vehicle input control device, vehicle input control system, vehicle input control method, and non-transitory storage medium in which program is storedTOYOTA MOTOR CO LTD·Filed 2022·Application pending·0 cites
- 3342US2002139480A1Methods for actively controlling RF peak-to-peak voltage in an inductively coupled plasma etching systemLAM RES CORP·Filed 2002·Application pending·0 cites
- 3438US2003111442A1Method for controlling chamber inner wall surface of an inductively coupled plasma etching apparatusLAM RES CORP·Filed 2003·Application pending·0 cites
- 3535US6173841B1Film cartridge sorting device for use with photographic film processorFUJI PHOTO FILM CO LTD·Filed 1998·Granted Jan 16, 2001·6 cites·15 claims
- 3632US2003217762A1Water supply apparatus and method thereofLAM RES CORP·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →