Inventor · disambiguated record
Shigeki Nogami
Also filed as: NOGAMI SHIGEKI
1 granted patent·3 pending applications·1 citations·filing 2007–2011
15Inventor score
Top patents by PatentIndex Score
4 records- 0134US8806370B2Substrate processing apparatusNOGAMI SHIGEKI·Filed 2007·Granted Aug 12, 2014·1 cites·8 claims
- 0233US2009114346A1Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2008·Application pending·0 cites
- 0331US2009020408A1Substrate Processing Method and Substrate Processing ApparatusHITACHI INT ELECTRIC INC·Filed 2007·Application pending·0 cites
- 0423US2013014251A1Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →