Inventor · disambiguated record
Shin Osada
Also filed as: OSADA SHIN
1 granted patent·2 pending applications·10 citations·filing 2007–2008
32Inventor score
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0173US7490010B2Data collection method, substrate processing apparatus, and substrate processing systemTOKYO ELECTRON LTD·Filed 2007·Granted Feb 10, 2009·10 cites·4 claims
- 0240US2008236755A1Single-wafer type substrate processing apparatus having a carry-in port provided with first and second placement tables arranged in a lineTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 0333US2009087289A1Structure for storing a substrate and semiconductor manufacturing apparatusTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →