Inventor · disambiguated record
Sherman K. Poultney
Also filed as: POULTNEY SHERMAN · POULTNEY SHERMAN K
20 granted patents·2 pending applications·385 citations·filing 1982–2008
96Inventor score
Files withASML HOLDING NV13HUGHES AIRCRAFT CO3PERKIN ELMER CORP3INTEGRATED PROCESS EQUIPMENT C2ASML HOLDINGS N V1
Top patents by PatentIndex Score
22 records- 0190US7158238B2System and method for calibrating a spatial light modulator array using shearing interferometryASML HOLDING NV·Filed 2005·Granted Jan 2, 2007·11 cites·22 claims
- 0290US5563709AApparatus for measuring, thinning and flattening silicon structuresINTEGRATED PROCESS EQUIPMENT C·Filed 1994·Granted Oct 8, 1996·70 cites·12 claims
- 0389US7768653B2Method and system for wavefront measurements of an optical systemASML HOLDING NV·Filed 2008·Granted Aug 3, 2010·9 cites·20 claims
- 0489US6847461B1System and method for calibrating a spatial light modulator array using shearing interferometryASML HOLDING NV·Filed 2004·Granted Jan 25, 2005·27 cites·23 claims
- 0587US7580559B2System and method for calibrating a spatial light modulatorASML HOLDING NV·Filed 2004·Granted Aug 25, 2009·34 cites·16 claims
- 0686US7469058B2Method and system for a maskless lithography rasterization technique based on global optimizationASML HOLDING NV·Filed 2006·Granted Dec 23, 2008·8 cites·22 claims
- 0783US4729658AVery wide spectral coverage grating spectrometerPERKIN ELMER CORP·Filed 1986·Granted Mar 8, 1988·44 cites·19 claims
- 0882US6867846B2Tailored reflecting diffractor for EUV lithographic system aberration measurementASML HOLDING NV·Filed 2004·Granted Mar 15, 2005·21 cites·112 claims
- 0981US6965436B2System and method for calibrating a spatial light modulator array using shearing interferometryASML HOLDING NV·Filed 2004·Granted Nov 15, 2005·15 cites·22 claims
- 1075US5282921AApparatus and method for optimally scanning a two-dimensional surface of one or more objectsHUGHES AIRCRAFT CO·Filed 1992·Granted Feb 1, 1994·22 cites·15 claims
- 1170US7595931B2Grating for EUV lithographic system aberration measurementASML HOLDING NV·Filed 2005·Granted Sep 29, 2009·2 cites·20 claims
- 1267US7102733B2System and method to compensate for static and dynamic misalignments and deformations in a maskless lithography toolASML HOLDING NV·Filed 2004·Granted Sep 5, 2006·8 cites·29 claims
- 1366US7268891B2Transmission shear grating in checkerboard configuration for EUV wavefront sensorASML HOLDING NV·Filed 2004·Granted Sep 11, 2007·8 cites·61 claims
- 1463US5312510AApparatus for optimally scanning a two-dimensional surface of one or more objectsHUGHES AIRCRAFT CO·Filed 1993·Granted May 17, 1994·13 cites·8 claims
- 1560US5474647AWafer flow architecture for production wafer processingHUGHES AIRCRAFT CO·Filed 1993·Granted Dec 12, 1995·35 cites·29 claims
- 1656US5610102AMethod for co-registering semiconductor wafers undergoing work in one or more blind process modulesINTEGRATED PROCESS EQUIPMENT C·Filed 1993·Granted Mar 11, 1997·30 cites·18 claims
- 1753US7602503B2Methods for measuring a wavefront of an optical systemASML HOLDINGS N V·Filed 2007·Granted Oct 13, 2009·0 cites·19 claims
- 1852US4724326AOff-chip time-delayed integration area array Fraunhofer line discriminatorPERKIN ELMER CORP·Filed 1986·Granted Feb 9, 1988·18 cites·18 claims
- 1950US7113255B2Grating patch arrangement, lithographic apparatus, method of testing, device manufacturing method, and device manufactured therebyASML HOLDING NV·Filed 2003·Granted Sep 26, 2006·2 cites·29 claims
- 2045US4433245AFraunhofer line discriminatorPERKIN ELMER CORP·Filed 1982·Granted Feb 21, 1984·8 cites·13 claims
- 2143US2005259269A1Shearing interferometer with dynamic pupil fillASML HOLDING NV·Filed 2004·Application pending·0 cites
- 2239US2006001890A1Spatial light modulator as source module for DUV wavefront sensorASML HOLDING NV·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →