Inventor · disambiguated record
Shahryar Rokni
Also filed as: ROKNI SHAHRYAR
7 granted patents·484 citations·filing 1998–2002
88Inventor score
Files withCYMER INC7
Top patents by PatentIndex Score
7 records- 0197US6757316B2Four KHz gas discharge laserCYMER INC·Filed 2001·Granted Jun 29, 2004·97 cites·43 claims
- 0295US6028880AAutomatic fluorine control systemCYMER INC·Filed 1998·Granted Feb 22, 2000·227 cites·19 claims
- 0393US6704339B2Lithography laser with beam delivery and beam pointing controlCYMER INC·Filed 2002·Granted Mar 9, 2004·50 cites·80 claims
- 0487US5978406AFluorine control system for excimer lasersCYMER INC·Filed 1998·Granted Nov 2, 1999·75 cites·16 claims
- 0586US6882674B2Four KHz gas discharge laser systemCYMER INC·Filed 2001·Granted Apr 19, 2005·31 cites·66 claims
- 0648US6504860B2Purge monitoring system for gas discharge laserCYMER INC·Filed 2001·Granted Jan 7, 2003·4 cites·14 claims
- 0740US6539042B2Ultra pure component purge system for gas discharge laserCYMER INC·Filed 2001·Granted Mar 25, 2003·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →