Inventor · disambiguated record
Sho Saitoh
Also filed as: SAITOH SHO
2 granted patents·3 pending applications·0 citations·filing 2021–2025
22Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0153US12394632B2Plasma processing method and plasma processing systemTOKYO ELECTRON LTD·Filed 2023·Granted Aug 19, 2025·0 cites·19 claims
- 0253US2024213031A1Etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0351US2024429027A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0443US2025210307A1Etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0542US11810792B2Etching method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Nov 7, 2023·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →