Inventor · disambiguated record
Shuichiro Sakai
Also filed as: SAKAI SHUICHIRO
2 granted patents·7 pending applications·0 citations·filing 2021–2025
25Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD9
Top patents by PatentIndex Score
9 records- 0169US2025308923A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0260US12400870B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Aug 26, 2025·0 cites·8 claims
- 0360US2025340985A1Substrate processing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0458US2025188604A1Boron nitride film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0554US2025226210A1Film formation method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0650US11996296B2Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2021·Granted May 28, 2024·0 cites·16 claims
- 0748US2025253149A1Method of forming boron nitride film and film forming apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0848US2025224676A1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0945US2024194456A1Film forming method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →