Inventor · disambiguated record
Shu Satoh
Also filed as: SATOH SHU
30 granted patents·7 pending applications·219 citations·filing 1987–2025
96Inventor score
Top patents by PatentIndex Score
37 records- 0195US8035080B2Method and system for increasing beam current above a maximum energy for a charge stateAXCELIS TECH INC·Filed 2009·Granted Oct 11, 2011·26 cites·20 claims
- 0288US7282427B1Method of implanting a substrate and an ion implanter for performing the methodAPPLIED MATERIALS INC·Filed 2006·Granted Oct 16, 2007·11 cites·7 claims
- 0388US6908836B2Method of implanting a substrate and an ion implanter for performing the methodAPPLIED MATERIALS INC·Filed 2002·Granted Jun 21, 2005·26 cites·18 claims
- 0487US8933424B1Method for measuring transverse beam intensity distributionAXCELIS TECH INC·Filed 2013·Granted Jan 13, 2015·7 cites·18 claims
- 0585US9711328B2Method of measuring vertical beam profile in an ion implantation system having a vertical beam angle deviceAXCELIS TECH INC·Filed 2015·Granted Jul 18, 2017·4 cites·19 claims
- 0685US7842931B2Extraction electrode manipulatorAXCELIS TECH INC·Filed 2008·Granted Nov 30, 2010·8 cites·20 claims
- 0781US6207959B1Ion implanterAPPLIED MATERIALS INC·Filed 1999·Granted Mar 27, 2001·36 cites·14 claims
- 0880US7253424B2Method of implanting a substrate and an ion implanter for performing the methodAPPLIED MATERIALS INC·Filed 2006·Granted Aug 7, 2007·6 cites·34 claims
- 0978US12431332B2High energy implanter with small footprintAXCELIS TECH INC·Filed 2023·Granted Sep 30, 2025·0 cites·20 claims
- 1078US6331713B1Movable ion source assemblyAPPLIED MATERIALS INC·Filed 1999·Granted Dec 18, 2001·31 cites·19 claims
- 1176US7235797B2Method of implanting a substrate and an ion implanter for performing the methodAPPLIED MATERIALS INC·Filed 2005·Granted Jun 26, 2007·3 cites·19 claims
- 1275US8071964B2System and method of performing uniform dose implantation under adverse conditionsSATOH SHU·Filed 2009·Granted Dec 6, 2011·4 cites·16 claims
- 1375US7611975B2Method of implanting a substrate and an ion implanter for performing the methodAPPLIED MATERIALS INC·Filed 2006·Granted Nov 3, 2009·5 cites·9 claims
- 1473US6998626B1Method of producing a dopant gas speciesAPPLIED MATERIALS INC·Filed 2004·Granted Feb 14, 2006·9 cites·25 claims
- 1573US6878946B2Indirectly heated button cathode for an ion sourceAPPLIED MATERIALS INC·Filed 2002·Granted Apr 12, 2005·11 cites·28 claims
- 1671US9111719B1Method for enhancing beam utilization in a scanned beam ion implanterAXCELIS TECH INC·Filed 2014·Granted Aug 18, 2015·2 cites·15 claims
- 1771US7973290B2System and method of beam energy identification for single wafer ion implantationAXCELIS TECH INC·Filed 2008·Granted Jul 5, 2011·2 cites·8 claims
- 1870US7705328B2Broad ribbon beam ion implanter architecture with high mass-energy capabilityAXCELIS TECH INC·Filed 2007·Granted Apr 27, 2010·2 cites·25 claims
- 1969US7049210B2Method of implanting a substrate and an ion implanter for performing the methodAPPLIED MATERIALS INC·Filed 2004·Granted May 23, 2006·11 cites·11 claims
- 2067US2025336642A1Energy accuracy for an rf linear accelerator ion implantation systemAXCELIS TECH INC·Filed 2025·Application pending·0 cites
- 2166US11244800B2Stepped indirectly heated cathode with improved shieldingAXCELIS TECH INC·Filed 2021·Granted Feb 8, 2022·0 cites·21 claims
- 2266US4791273AVaporizer system for ion sourceVARIAN ASSOCIATES·Filed 1987·Granted Dec 13, 1988·15 cites·19 claims
- 2363US12463003B2High temperature ion sourceAXCELIS TECH INC·Filed 2025·Granted Nov 4, 2025·0 cites·16 claims
- 2460US2025046563A1Magnetic focusing device low energy ion beamsAXCELIS TECH INC·Filed 2023·Application pending·0 cites
- 2555US7858955B2System and method of controlling broad beam uniformityAXCELIS TECH INC·Filed 2008·Granted Dec 28, 2010·0 cites·18 claims
- 2652US7528390B2Broad beam ion implantation architectureAXCELIS TECH INC·Filed 2006·Granted May 5, 2009·0 cites·14 claims
- 2749US2023139138A1Charge filter magnet with variable achromaticityAXCELIS TECH INC·Filed 2021·Application pending·0 cites
- 2849US2021398772A1Tuning apparatus for minimum divergence ion beamAXCELIS TECH INC·Filed 2021·Application pending·0 cites
- 2946US11923169B2Apparatus and method for metal contamination control in an ion implantation system using charge stripping mechanismAXCELIS TECH INC·Filed 2021·Granted Mar 5, 2024·0 cites·18 claims
- 3046US2020381209A1Charge stripping for ion implantation systemsAXCELIS TECH INC·Filed 2020·Application pending·0 cites
- 3145US10342114B2RF resonator for ion beam accelerationAXCELIS TECH INC·Filed 2018·Granted Jul 2, 2019·0 cites·20 claims
- 3245US2021057182A1Method of enhancing the energy and beam current on rf based implanterAXCELIS TECH INC·Filed 2019·Application pending·0 cites
- 3344US8080814B2Method for improving implant uniformity during photoresist outgassingSATOH SHU·Filed 2010·Granted Dec 20, 2011·0 cites·20 claims
- 3441US10024825B2Wafer clamp detection based on vibration or acoustic characteristic analysisAXCELIS TECH INC·Filed 2015·Granted Jul 17, 2018·0 cites·16 claims
- 3541US9490185B2Implant-induced damage control in ion implantationAXCELIS TECH INC·Filed 2013·Granted Nov 8, 2016·0 cites·11 claims
- 3639US8227773B2Versatile beam glitch detection systemSATOH SHU·Filed 2010·Granted Jul 24, 2012·0 cites·19 claims
- 3738US2003168609A1Indirectly heated button cathode for an ion sourceFiled 2002·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Shu Satoh files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →