Inventor · disambiguated record
Shigeru Senzaki
Also filed as: SENZAKI SHIGERU
7 granted patents·6 pending applications·119 citations·filing 2001–2016
85Inventor score
Top patents by PatentIndex Score
13 records- 0196US10199246B2Temperature control mechanism, temperature control method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Feb 5, 2019·44 cites·5 claims
- 0291US6899786B2Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanismTOKYO ELECTRON LTD·Filed 2001·Granted May 31, 2005·52 cites·4 claims
- 0386US7481903B2Processing device and method of maintaining the device, mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanismTOKYO ELECTRON LTD·Filed 2005·Granted Jan 27, 2009·11 cites·3 claims
- 0476US9613837B2Substrate processing apparatus and maintenance method thereofTOKYO ELECTRON LTD·Filed 2013·Granted Apr 4, 2017·4 cites·17 claims
- 0574US10276405B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Apr 30, 2019·3 cites·3 claims
- 0674US10069443B2Dechuck control method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2012·Granted Sep 4, 2018·4 cites·18 claims
- 0764US9818582B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2016·Granted Nov 14, 2017·1 cites·7 claims
- 0848US2013193087A1Water treatment device and water treatment methodMORIYA TSUYOSHI·Filed 2011·Application pending·0 cites
- 0947US2013240479A1Method for producing filtration filterTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 1047US2013226752A1Method for calculating bill for use of water purification system and water purification systemTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 1142US2009052182A1Illumination systemMATSUBA YOSHIAKI·Filed 2006·Application pending·0 cites
- 1236US2009290336A1Lighting device and lighting systemHARISON TOSHIBA LIGHTING CORP·Filed 2005·Application pending·0 cites
- 1333US2016086773A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →