Inventor · disambiguated record
Shou-Qian Shao
Also filed as: SHAO SHOU-QIAN
1 granted patent·4 pending applications·7 citations·filing 2001–2008
29Inventor score
Top patents by PatentIndex Score
5 records- 0154US7029505B2Sheet type heat treating apparatus and method for processing semiconductorsTOKYO ELECTRON LTD·Filed 2001·Granted Apr 18, 2006·7 cites·14 claims
- 0251US2008083609A1Oxygen conditioning of plasma vesselsMKS INSTR INC·Filed 2007·Application pending·0 cites
- 0348US2008083701A1Oxygen conditioning of plasma vesselsMKS INSTR INC·Filed 2006·Application pending·0 cites
- 0443US2008127895A1Ultraviolet-ray-assisted processing apparatus for semiconductor processSHAO SHOU-QIAN·Filed 2008·Application pending·0 cites
- 0530US2004149215A1Ultraviolet ray assisted processing device for semiconductor processingFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →