Inventor · disambiguated record
Shinya Shima
Also filed as: SHIMA SHINYA
5 granted patents·96 citations·filing 2002–2014
83Inventor score
Technology areasH01J
Top patents by PatentIndex Score
5 records- 0194US8387562B2Plasma processor and plasma processing methodKIKUCHI AKIHIRO·Filed 2011·Granted Mar 5, 2013·22 cites·12 claims
- 0293US9437402B2Plasma processor and plasma processing methodTOKYO ELECTRON LTD·Filed 2014·Granted Sep 6, 2016·11 cites·9 claims
- 0393US8056503B2Plasma procesor and plasma processing methodKIKUCHI AKIHIRO·Filed 2002·Granted Nov 15, 2011·47 cites·31 claims
- 0492US8904957B2Plasma processor and plasma processing methodTOKYO ELECTRON LTD·Filed 2013·Granted Dec 9, 2014·12 cites·2 claims
- 0585US9728381B2Plasma processor and plasma processing methodTOKYO ELECTRON LTD·Filed 2014·Granted Aug 8, 2017·4 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →