Inventor · disambiguated record
Sherjang Singh
Also filed as: SINGH SHERJANG
6 granted patents·4 pending applications·3 citations·filing 2010–2018
69Inventor score
Top patents by PatentIndex Score
10 records- 0168US10265739B2Method and apparatus for treating substratesSUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO KG·Filed 2017·Granted Apr 23, 2019·1 cites·22 claims
- 0266US10504774B2Lithographic patterning to form fine pitch featuresGLOBALFOUNDRIES INC·Filed 2016·Granted Dec 10, 2019·1 cites·20 claims
- 0364US9195132B2Mask structures and methods of manufacturingGLOBALFOUNDRIES INC·Filed 2014·Granted Nov 24, 2015·1 cites·20 claims
- 0445US2018299765A1Extreme ultraviolet lithography (euvl) reflective maskGLOBALFOUNDRIES INC·Filed 2017·Application pending·0 cites
- 0544US10401724B2Pellicle replacement in EUV mask flowGLOBALFOUNDRIES INC·Filed 2017·Granted Sep 3, 2019·0 cites·20 claims
- 0639US9662684B2Method and apparatus for treating substratesDIETZE UWE·Filed 2010·Granted May 30, 2017·0 cites·12 claims
- 0735US2019079408A1Dual developing methods for lithography patterningGLOBALFOUNDRIES INC·Filed 2017·Application pending·0 cites
- 0831US11358172B2Method for treating substrates with an aqueous liquid medium exposed to UV-radiationSUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO KG·Filed 2015·Granted Jun 14, 2022·0 cites·22 claims
- 0930US2019258157A1Photolithography system and method incorporating a photomask-pellicle apparatus with an angled pellicleGLOBALFOUNDRIES INC·Filed 2018·Application pending·0 cites
- 1030US2017271145A1Method and an apparatus for cleaning substratesSUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO KG·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →