Inventor · disambiguated record
Shannon Spencer
Also filed as: SPENCER SHANNON
3 granted patents·1 pending application·12 citations·filing 2006–2012
63Inventor score
Top patents by PatentIndex Score
4 records- 0181US8152954B2Showerhead electrode assemblies and plasma processing chambers incorporating the sameBETTENCOURT GREG·Filed 2007·Granted Apr 10, 2012·7 cites·22 claims
- 0273US8268117B2Showerhead electrodesBETTENCOURT GREG·Filed 2012·Granted Sep 18, 2012·1 cites·17 claims
- 0371US8043470B2Electrode/probe assemblies and plasma processing chambers incorporating the sameLAM RES CORP·Filed 2007·Granted Oct 25, 2011·4 cites·20 claims
- 0441US2007284339A1Plasma etching chamber parts made with EDMMOORE DAVID O·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →