Inventor · disambiguated record
Shih-Feng Su
Also filed as: SU SHIH-FENG
3 granted patents·1 pending application·3 citations·filing 2006–2023
52Inventor score
Top patents by PatentIndex Score
4 records- 0166US12276020B2Semiconductor cleaning stepUNITED SEMICONDUCTOR XIAMEN CO LTD·Filed 2023·Granted Apr 15, 2025·0 cites·12 claims
- 0255US7763522B2Method of high density plasma gap-filling with minimization of gas phase nucleationUNITED MICROELECTRONIC CORP·Filed 2007·Granted Jul 27, 2010·3 cites·18 claims
- 0336US8431473B2Method for fabricating semiconductor deviceHU SHU-HUI·Filed 2011·Granted Apr 30, 2013·0 cites·20 claims
- 0435US2008026579A1Copper damascene processLAI KUO-CHIH·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →