Inventor · disambiguated record
Shova Subedi
Also filed as: SUBEDI SHOVA
0 granted patents·3 pending applications·0 citations·filing 2023–2024
Files withKLA CORP3
Top patents by PatentIndex Score
3 records- 0160US2024176206A1Interface-based thin film metrology using second harmonic generationKLA CORP·Filed 2023·Application pending·0 cites
- 0259US2025146893A1Transistor channel stress and mobility metrology using multipass spectroscopic ellipsometry and raman joint measurementKLA CORP·Filed 2024·Application pending·0 cites
- 0356US2024418633A1Combination of multiwavelength raman and spectroscopic ellipsometry to measure a film stackKLA CORP·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →