Inventor · disambiguated record
Shuichi Suemasa
Also filed as: SUEMASA SHUICHI
5 granted patents·4 pending applications·1 citations·filing 2015–2024
60Inventor score
Files withEBARA CORP9
Top patents by PatentIndex Score
9 records- 0166US2024082885A1Substrate cleaning device and method of cleaning substrateEBARA CORP·Filed 2023·Application pending·0 cites
- 0264US9908212B2Polishing table replacement apparatus, polishing table replacement method, and apparatus for replacing a component of semiconductor-device manufacturing machineEBARA CORP·Filed 2015·Granted Mar 6, 2018·1 cites·11 claims
- 0358US2022203411A1Substrate cleaning device and method of cleaning substrateEBARA CORP·Filed 2021·Application pending·0 cites
- 0454US2025100020A1Nozzle position adjusting device, nozzle position adjusting method, and nozzle position adjusting holderEBARA CORP·Filed 2024·Application pending·0 cites
- 0554US2024402054A1Substrate holding device and method for detecting wear in substrate holding deviceEBARA CORP·Filed 2024·Application pending·0 cites
- 0647US10751761B2Self-cleaning device and substrate processing apparatusEBARA CORP·Filed 2018·Granted Aug 25, 2020·0 cites·8 claims
- 0743US11524322B2Jig for attaching and detaching cleaning memberEBARA CORP·Filed 2020·Granted Dec 13, 2022·0 cites·9 claims
- 0842US11837482B2Substrate holding and rotation mechanism and substrate processing apparatusEBARA CORP·Filed 2021·Granted Dec 5, 2023·0 cites·8 claims
- 0942US11004701B2Break-in apparatus, break-in system and storage mediaEBARA CORP·Filed 2018·Granted May 11, 2021·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →