Inventor · disambiguated record
Shing-Li Sung
Also filed as: SUNG SHING-LI
3 granted patents·5 pending applications·50 citations·filing 1999–2008
71Inventor score
Top patents by PatentIndex Score
8 records- 0183US7432210B2Process to open carbon based hardmaskAPPLIED MATERIALS INC·Filed 2005·Granted Oct 7, 2008·9 cites·9 claims
- 0277US7510976B2Dielectric plasma etch process with in-situ amorphous carbon mask with improved critical dimension and etch selectivityAPPLIED MATERIALS INC·Filed 2006·Granted Mar 31, 2009·6 cites·20 claims
- 0370US6346303B1Process for synthesizing one-dimensional nanosubstances by electron cyclotron resonance chemical vapor depositionFiled 1999·Granted Feb 12, 2002·35 cites·16 claims
- 0448US2008286977A1Process to open carbon based hardmask overlying a dielectric layerWANG JUDY·Filed 2008·Application pending·0 cites
- 0545US2009293907A1Method of substrate polymer removalFUNG NANCY·Filed 2008·Application pending·0 cites
- 0643US2009023294A1Method for etching using advanced patterning film in capacitive coupling high frequency plasma dielectric etch chamberAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 0730US2004152331A1Process for etching polysilicon gates with good mask selectivity, critical dimension control, and cleanlinessAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
- 0829US2003236004A1Dechucking with N2/O2 plasmaAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →