Inventor · disambiguated record
Shinji Tahara
Also filed as: TAHARA SHINJI
2 granted patents·1 pending application·4 citations·filing 2018–2025
44Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0185US11232959B2Substrate processing apparatus and substrate processing meihodTOKYO ELECTRON LTD·Filed 2018·Granted Jan 25, 2022·4 cites·5 claims
- 0263US11915947B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Feb 27, 2024·0 cites·6 claims
- 0351US2025360542A1Processing liquid supply device and processing liquid supply methodSCREEN HOLDINGS CO LTD·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →