Inventor · disambiguated record
Shi Wei Toh
Also filed as: TOH SHI WEI
4 granted patents·1 pending application·3 citations·filing 2014–2022
60Inventor score
Files withAPPLIED MATERIALS INC5
Top patents by PatentIndex Score
5 records- 0185US12293902B2Process kit for a substrate supportAPPLIED MATERIALS INC·Filed 2022·Granted May 6, 2025·1 cites·20 claims
- 0278US11387134B2Process kit for a substrate supportAPPLIED MATERIALS INC·Filed 2019·Granted Jul 12, 2022·2 cites·19 claims
- 0354US2016133441A1Etch enhancement via controlled introduction of chamber contaminantsAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 0442US10008388B2Device conformity control by low temperature, low pressure, inductively coupled ammonia-nitrogen trifluoride plasmaAPPLIED MATERIALS INC·Filed 2017·Granted Jun 26, 2018·0 cites·20 claims
- 0537US10256076B2Substrate processing apparatus and methodsAPPLIED MATERIALS INC·Filed 2015·Granted Apr 9, 2019·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →