Inventor · disambiguated record
Shinpei Tokunaga
Also filed as: TOKUNAGA SHINPEI
5 granted patents·0 citations·filing 2019–2023
59Inventor score
Files withEBARA CORP5
Top patents by PatentIndex Score
5 records- 0172US12123714B2Output signal processing circuit for eddy current sensor and output signal processing method for eddy current sensorEBARA CORP·Filed 2023·Granted Oct 22, 2024·0 cites·3 claims
- 0260US11731233B2Eddy current detection device and polishing apparatusEBARA CORP·Filed 2019·Granted Aug 22, 2023·0 cites·11 claims
- 0359US11852472B2Output signal processing circuit for eddy current sensor and output signal processing method for eddy current sensorEBARA CORP·Filed 2020·Granted Dec 26, 2023·0 cites·6 claims
- 0456US12179310B2Output signal processing apparatus for eddy current sensorEBARA CORP·Filed 2021·Granted Dec 31, 2024·0 cites·21 claims
- 0545US11633828B2Substrate polishing system, substrate polishing method and substrate polishing apparatusEBARA CORP·Filed 2020·Granted Apr 25, 2023·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →