Inventor · disambiguated record
Sho Tominaga
Also filed as: TOMINAGA SHO
9 granted patents·1 pending application·168 citations·filing 2015–2025
88Inventor score
Files withTOKYO ELECTRON LTD10
Top patents by PatentIndex Score
10 records- 0196US10707090B2Plasma etching methodTOKYO ELECTRON LTD·Filed 2018·Granted Jul 7, 2020·41 cites·20 claims
- 0296US10381237B2Etching methodTOKYO ELECTRON LTD·Filed 2018·Granted Aug 13, 2019·39 cites·12 claims
- 0396US9666446B2Etching methodTOKYO ELECTRON LTD·Filed 2016·Granted May 30, 2017·43 cites·13 claims
- 0495US9997374B2Etching methodTOKYO ELECTRON LTD·Filed 2016·Granted Jun 12, 2018·38 cites·12 claims
- 0583US9966273B2Plasma etching methodTOKYO ELECTRON LTD·Filed 2016·Granted May 8, 2018·3 cites·8 claims
- 0680US9779961B2Etching methodTOKYO ELECTRON LTD·Filed 2015·Granted Oct 3, 2017·4 cites·12 claims
- 0767US11404281B2Method of etching silicon containing films selectively against each otherTOKYO ELECTRON LTD·Filed 2020·Granted Aug 2, 2022·0 cites·5 claims
- 0860US10903084B2Method of etching silicon containing films selectively against each otherTOKYO ELECTRON LTD·Filed 2019·Granted Jan 26, 2021·0 cites·5 claims
- 0959US10304691B2Method of etching silicon oxide and silicon nitride selectively against each otherTOKYO ELECTRON LTD·Filed 2017·Granted May 28, 2019·0 cites·5 claims
- 1045US2025157798A1Control program, information processing program, control method, information processing method, plasma processing device, and information processing deviceTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →