Inventor · disambiguated record
Shih-En Tseng
Also filed as: TSENG SHIH-EN
1 granted patent·1 pending application·0 citations·filing 2004–2015
7Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV2
Top patents by PatentIndex Score
2 records- 0135US2005136340A1Lithographic apparatus and methods, patterning structure and method for making a patterning structure, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
- 0222US9946166B2Reduction of hotspots of dense featuresASML NETHERLANDS BV·Filed 2015·Granted Apr 17, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →