Inventor · disambiguated record
Shota Umezaki
Also filed as: UMEZAKI SHOTA
9 granted patents·14 pending applications·3 citations·filing 2019–2025
77Inventor score
Top patents by PatentIndex Score
23 records- 0187US11217451B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jan 4, 2022·2 cites·12 claims
- 0282US12322606B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2024·Granted Jun 3, 2025·0 cites·7 claims
- 0378US2025273485A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0471US10892176B2Substrate processing apparatus having top plate with through hole and substrate processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Jan 12, 2021·1 cites·9 claims
- 0570US12057326B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Aug 6, 2024·0 cites·13 claims
- 0670US2023352328A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0766US2025249623A1Method for manufacturing frp precursor and method for manufacturing frpRESONAC CORP·Filed 2023·Application pending·0 cites
- 0863US2022059357A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0962US2025167010A1Substrate processing apparatus, fluid supply system, and substrate processing methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1059US2024240859A1Substrate processing apparatus and substrate processing apparatus maintenance methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1159US2024242977A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1258US2024194496A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1356US11742232B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Aug 29, 2023·0 cites·4 claims
- 1456US2025323064A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 1556US2024234172A9Substrate processing apparatus and fluid heating deviceTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1655US2024242978A1Substrate processing apparatus and substrate processing apparatus maintenance methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1754US2022177670A1Resin composition, film and cured prductSHOWA DENKO MATERIALS CO LTD·Filed 2020·Application pending·0 cites
- 1852US12255081B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2022·Granted Mar 18, 2025·0 cites·10 claims
- 1952US11688613B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Jun 27, 2023·0 cites·14 claims
- 2052US2024395589A1Substrate processing apparatus and method of adjusting substrate transfer positionTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 2151US12283495B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Apr 22, 2025·0 cites·9 claims
- 2251US11373883B2Substrate processing apparatus, substrate processing system and substrate processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Jun 28, 2022·0 cites·20 claims
- 2343US2019341272A1Substrate processing apparatus, substrate processing system, and substrate processing methodTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →