Inventor · disambiguated record
Shunichi Uzawa
Also filed as: UZAWA SHUNICHI
63 granted patents·1,655 citations·filing 1980–2001
99Inventor score
Top patents by PatentIndex Score
63 records- 0193US5063582ALiquid cooled x-ray lithographic exposure apparatusCANON KK·Filed 1991·Granted Nov 5, 1991·91 cites·17 claims
- 0292US5182615AExposure apparatusCANON KK·Filed 1990·Granted Jan 26, 1993·79 cites·12 claims
- 0391US5577552ATemperature controlling device for mask and wafer holdersCANON KK·Filed 1995·Granted Nov 26, 1996·95 cites·4 claims
- 0491US5231291AWafer table and exposure apparatus with the sameCANON KK·Filed 1992·Granted Jul 27, 1993·149 cites·16 claims
- 0588US5142156AAlignment method for printing a pattern of an original onto different surface areas of a substrateCANON KK·Filed 1990·Granted Aug 25, 1992·63 cites·6 claims
- 0686US5157700AExposure apparatus for controlling intensity of exposure radiationCANON KK·Filed 1989·Granted Oct 20, 1992·41 cites·47 claims
- 0785US5498501AExposure methodCANON KK·Filed 1995·Granted Mar 12, 1996·59 cites·25 claims
- 0883US5138643AExposure apparatusCANON KK·Filed 1990·Granted Aug 11, 1992·42 cites·9 claims
- 0982US5524131AAlignment apparatus and SOR x-ray exposure apparatus having sameCANON KK·Filed 1995·Granted Jun 4, 1996·46 cites·20 claims
- 1081US5172402AExposure apparatusCANON KK·Filed 1991·Granted Dec 15, 1992·33 cites·18 claims
- 1181US4969168AWafer supporting apparatusCANON KK·Filed 1989·Granted Nov 6, 1990·54 cites·8 claims
- 1279US5285488AExposure apparatusCANON KK·Filed 1992·Granted Feb 8, 1994·33 cites·22 claims
- 1379US4461956ASolid-state photoelectric converterCANON KK·Filed 1983·Granted Jul 24, 1984·37 cites·22 claims
- 1478US4906326AMask repair systemCANON KK·Filed 1989·Granted Mar 6, 1990·40 cites·10 claims
- 1577US5822389AAlignment apparatus and SOR X-ray exposure apparatus having sameCANON KK·Filed 1995·Granted Oct 13, 1998·36 cites·5 claims
- 1677US5329126AApparatus and process for vacuum-holding an objectCANON KABUHIKI KAISHA·Filed 1993·Granted Jul 12, 1994·30 cites·26 claims
- 1776US5610965AExposure methodCANON KK·Filed 1994·Granted Mar 11, 1997·29 cites·15 claims
- 1875US5150391AExposure apparatusCANON KK·Filed 1992·Granted Sep 22, 1992·28 cites·5 claims
- 1975US5128975AX-ray exposure systemCANON KK·Filed 1991·Granted Jul 7, 1992·28 cites·18 claims
- 2074US4390791ASolid-state photoelectric transducerCANON KK·Filed 1981·Granted Jun 28, 1983·31 cites·58 claims
- 2171US5159621AX-ray transmitting window and method of mounting the sameCANON KK·Filed 1991·Granted Oct 27, 1992·22 cites·10 claims
- 2271US5125014AX-ray exposure apparatusCANON KK·Filed 1990·Granted Jun 23, 1992·25 cites·6 claims
- 2371US4796301AImage transmission apparatusCANON KK·Filed 1985·Granted Jan 3, 1989·24 cites·16 claims
- 2470US6455203B1Mask structure and method of manufacturing the sameCANON KK·Filed 2000·Granted Sep 24, 2002·10 cites·14 claims
- 2570US5566922AGate valve deviceCANON KK·Filed 1995·Granted Oct 22, 1996·29 cites·6 claims
- 2670US5317615AExposure apparatusCANON KK·Filed 1992·Granted May 31, 1994·22 cites·22 claims
- 2770US5155523AWorkpiece supporting mechanismCANON KK·Filed 1989·Granted Oct 13, 1992·35 cites·30 claims
- 2868US5323440AX-ray lithography apparatus including a dose detectable maskCANON KK·Filed 1993·Granted Jun 21, 1994·21 cites·15 claims
- 2968US5131022AExposure method and apparatusCANON KK·Filed 1991·Granted Jul 14, 1992·20 cites·14 claims
- 3068US5008703AExposure apparatus and control of the sameCANON KK·Filed 1989·Granted Apr 16, 1991·18 cites·9 claims
- 3167US6018395AAlignment systemCANON KK·Filed 1996·Granted Jan 25, 2000·26 cites·9 claims
- 3267US5112133AAlignment systemCANON KK·Filed 1991·Granted May 12, 1992·42 cites·11 claims
- 3366US4532536APhoto-electric transducerCANON KK·Filed 1981·Granted Jul 30, 1985·22 cites·19 claims
- 3465US5356686AX-ray mask structureCANON KK·Filed 1994·Granted Oct 18, 1994·22 cites·6 claims
- 3565US5172403AX-ray exposure apparatusCANON KK·Filed 1990·Granted Dec 15, 1992·19 cites·14 claims
- 3663US4288799ALiquid jet recording head with permanent jig alignmentCANON KK·Filed 1980·Granted Sep 8, 1981·12 cites·6 claims
- 3758US4634886APhotoelectric imager with a high S/N ratioCANON KK·Filed 1984·Granted Jan 6, 1987·12 cites·3 claims
- 3857US5168512AMethod of manufacture of semiconductor devicesCANON KK·Filed 1991·Granted Dec 1, 1992·26 cites·25 claims
- 3957US4405915APhotoelectric transducing elementCANON KK·Filed 1981·Granted Sep 20, 1983·15 cites·33 claims
- 4056US5443932AExposure methodCANON KK·Filed 1993·Granted Aug 22, 1995·13 cites·5 claims
- 4156US5390227AExposure apparatusCANON KK·Filed 1993·Granted Feb 14, 1995·12 cites·17 claims
- 4254US5001734ASOR exposure systemCANON KK·Filed 1989·Granted Mar 19, 1991·10 cites·10 claims
- 4353US6647087B2Exposure methodCANON KK·Filed 2001·Granted Nov 11, 2003·3 cites·40 claims
- 4452US4882776AImage information transmitting systemCANON KK·Filed 1986·Granted Nov 21, 1989·11 cites·19 claims
- 4552US4405857ASolid-state photoelectric converterCANON KK·Filed 1981·Granted Sep 20, 1983·13 cites·12 claims
- 4651US6947518B2X-ray exposure apparatus, X-ray exposure method, X-ray mask, X-ray mirror, synchrotron radiation apparatus, synchrotron radiation method and semiconductor deviceCANON KK·Filed 2001·Granted Sep 20, 2005·3 cites·8 claims
- 4750US5160961ASubstrate holding deviceCANON KK·Filed 1991·Granted Nov 3, 1992·19 cites·19 claims
- 4849US6272202B1Exposure method and X-ray mask structure for use with the sameCANON KK·Filed 1999·Granted Aug 7, 2001·14 cites·17 claims
- 4947US6645707B2Device manufacturing methodCANON KK·Filed 2000·Granted Nov 11, 2003·1 cites·11 claims
- 5047US5226523AConveying apparatus and method of controlling the sameCANON KK·Filed 1992·Granted Jul 13, 1993·8 cites·10 claims
Showing the top 50 of 63 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →