Inventor · disambiguated record
Shigeru Wakiyama
Also filed as: WAKIYAMA SHIGERU
19 granted patents·2 pending applications·224 citations·filing 1987–2014
94Inventor score
Files withSEIKO INSTR INC7SII NANOTECHNOLOGY INC6AGENCY IND SCIENCE TECHN2MITSUBISHI ELECTRIC CORP2HITACHI HIGH TECH SCIENCE CORP1
Top patents by PatentIndex Score
21 records- 0182US6355495B1Method and apparatus for analyzing minute foreign substance, and process for semiconductor elements or liquid crystal elements by use thereofMITSUBISHI ELECTRIC CORP·Filed 2000·Granted Mar 12, 2002·27 cites·10 claims
- 0268US7259372B2Processing method using probe of scanning probe microscopeSII NANOTECHNOLOGY INC·Filed 2005·Granted Aug 21, 2007·4 cites·14 claims
- 0367US4866271ARelative displacement control apparatusAGENCY IND SCIENCE TECHN·Filed 1987·Granted Sep 12, 1989·28 cites·12 claims
- 0466US5877035AAnalyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the sameMITSUBISHI ELECTRIC CORP·Filed 1996·Granted Mar 2, 1999·29 cites·33 claims
- 0565US6124142AMethod for analyzing minute foreign substance elementsSEIKO INSTR INC·Filed 1996·Granted Sep 26, 2000·27 cites·24 claims
- 0664US7232995B2Method of removing particle of photomask using atomic force microscopeSII NANOTECHNOLOGY INC·Filed 2005·Granted Jun 19, 2007·1 cites·6 claims
- 0759US7945964B2Apparatus structure and scanning probe microscope including apparatus structureSII NANOTECHNOLOGY INC·Filed 2009·Granted May 17, 2011·2 cites·5 claims
- 0859US4921346ATunnel current detecting photo-acoustic spectrometerAGENCY IND SCIENCE TECHN·Filed 1988·Granted May 1, 1990·18 cites·5 claims
- 0958US6255127B1Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the sameSEIKO INSTR INC·Filed 1998·Granted Jul 3, 2001·20 cites·10 claims
- 1057US7278299B2Method of processing vertical cross-section using atomic force microscopeSII NANOTECHNOLOGY INC·Filed 2005·Granted Oct 9, 2007·2 cites·5 claims
- 1155US6259093B1Surface analyzing apparatusSEIKO INSTR INC·Filed 1998·Granted Jul 10, 2001·21 cites·17 claims
- 1255US5423514AAlignment assembly for aligning a spring element with a laser beam in a probe microscopeSEIKO INSTR INC·Filed 1994·Granted Jun 13, 1995·16 cites·2 claims
- 1354US6388249B2Surface analyzing apparatusSEIKO INSTR INC·Filed 2001·Granted May 14, 2002·3 cites·12 claims
- 1451US7373806B2Scanning probe microscope and scanning methodSII NANOTECHNOLOGY INC·Filed 2004·Granted May 20, 2008·6 cites·26 claims
- 1549US8495759B2Probe aligning method for probe microscope and probe microscope operated by the sameWAKIYAMA SHIGERU·Filed 2009·Granted Jul 23, 2013·2 cites·12 claims
- 1645US5453616AProbe microscope having error correction piezoelectric scannerSEIKO INSTR INC·Filed 1994·Granted Sep 26, 1995·10 cites·4 claims
- 1744US9766267B2Actuator position calculation device, actuator position calculation method, and actuator position calculation programHITACHI HIGH-TECH SCIENCE CORP·Filed 2014·Granted Sep 19, 2017·0 cites·6 claims
- 1844US2004209163A1Electrochemical cellFiled 2004·Application pending·0 cites
- 1940US6184519B1Surface analyzing apparatus with anti-vibration tableSEIKO INSTR INC·Filed 1998·Granted Feb 6, 2001·8 cites·35 claims
- 2039US2004154744A1Method and system for surface or cross-sectional processing and observationFiled 2004·Application pending·0 cites
- 2132US7378654B2Processing probeSII NANOTECHNOLOGY INC·Filed 2005·Granted May 27, 2008·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →