Inventor · disambiguated record
Shunji Yamakawa
Also filed as: YAMAKAWA Shunji
1 granted patent·1 pending application·0 citations·filing 2021–2021
5Inventor score
Technology areasH10W
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0149US11702734B2Method for forming ruthenium film and apparatus for forming ruthenium filmTOKYO ELECTRON LTD·Filed 2021·Granted Jul 18, 2023·0 cites·6 claims
- 0245US2023377893A1Method for manufacturing semiconductor device, and device for manufacturing semiconductor deviceTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →