Inventor · disambiguated record
Shuji Yonemitsu
Also filed as: YONEMITSU SHUJI
4 granted patents·1 pending application·472 citations·filing 1995–2002
84Inventor score
Top patents by PatentIndex Score
5 records- 0196US5788447ASubstrate processing apparatusKOKUSAI ELECTRIC CO LTD·Filed 1996·Granted Aug 4, 1998·246 cites·26 claims
- 0289US6066210ASubstrate processing apparatus with a processing chamber, transfer chamber, intermediate holding chamber, and an atmospheric pressure sectionKOKUSAI ELECTRIC CO LTD·Filed 1996·Granted May 23, 2000·93 cites·14 claims
- 0388US6143083ASubstrate transferring mechanismKOKUSAI ELECTRIC CO LTD·Filed 1999·Granted Nov 7, 2000·81 cites·3 claims
- 0477US5632820AThermal treatment furnace in a system for manufacturing semiconductorsKOKUSAI ELECTRIC CO LTD·Filed 1995·Granted May 27, 1997·52 cites·10 claims
- 0535US2002197145A1Substrate processing apparatus and a method for fabricating a semiconductor device by using sameHITACHI INT ELECTRIC INC·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →