Inventor · disambiguated record
Siu F. Cheng
Also filed as: CHENG SIU F · CHENG SIU FAI
12 granted patents·5 pending applications·118 citations·filing 2008–2022
90Inventor score
Files withSURFX TECH LLC6APPLIED MATERIALS INC4CHENG SIU F3AEROSPACE MATERIALS PROC LLC1DU BOIS DALE R1
Top patents by PatentIndex Score
17 records- 0197US10032609B1Low temperature atmospheric pressure plasma applicationsSURFX TECH LLC·Filed 2016·Granted Jul 24, 2018·18 cites·15 claims
- 0296US9406485B1Argon and helium plasma apparatus and methodsSURFX TECH LLC·Filed 2014·Granted Aug 2, 2016·47 cites·23 claims
- 0395US10800092B1Low temperature atmospheric pressure plasma for cleaning and activating metalsSURFX TECH LLC·Filed 2018·Granted Oct 13, 2020·15 cites·20 claims
- 0492US10118315B1Preparing tool surfaces for compositesAEROSPACE MATERIALS PROC LLC·Filed 2014·Granted Nov 6, 2018·14 cites·19 claims
- 0588US8227352B2Amorphous carbon deposition method for improved stack defectivityYU HANG·Filed 2011·Granted Jul 24, 2012·13 cites·20 claims
- 0678US8097082B2Nonplanar faceplate for a plasma processing chamberZHOU JIANHUA·Filed 2008·Granted Jan 17, 2012·4 cites·16 claims
- 0774US10227695B2Shadow ring for modifying wafer edge and bevel depositionDU BOIS DALE R·Filed 2010·Granted Mar 12, 2019·4 cites·13 claims
- 0872US11136665B2Shadow ring for modifying wafer edge and bevel depositionAPPLIED MATERIALS INC·Filed 2019·Granted Oct 5, 2021·1 cites·13 claims
- 0963US11518082B1Low temperature atmospheric pressure plasma for cleaning and activating metalsSURFX TECH LLC·Filed 2020·Granted Dec 6, 2022·0 cites·10 claims
- 1061US8278139B2Passivating glue layer to improve amorphous carbon to metal adhesionCHENG SIU F·Filed 2009·Granted Oct 2, 2012·2 cites·6 claims
- 1154US2023049702A1Device for plasma treatment of electronic materialsSURFX TECH LLC·Filed 2022·Application pending·0 cites
- 1251US8349741B2Amorphous carbon deposition method for improved stack defectivityAPPLIED MATERIALS INC·Filed 2012·Granted Jan 8, 2013·0 cites·19 claims
- 1349US2016086794A9Nitrogen doped amorphous carbon hardmaskAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 1446US8569105B2Passivating glue layer to improve amorphous carbon to metal adhesionCHENG SIU F·Filed 2012·Granted Oct 29, 2013·0 cites·1 claims
- 1544US2020152430A1Device and method for plasma treatment of electronic materialsSURFX TECH LLC·Filed 2019·Application pending·0 cites
- 1643US2011244142A1Nitrogen doped amorphous carbon hardmaskAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 1743US2012043518A1Variable resistance memory element and fabrication methodsCHENG SIU F·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →