Inventor · disambiguated record
Simon Halm
Also filed as: HALM SIMON
3 granted patents·4 citations·filing 2019–2022
55Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0180US11508601B2Electrostatic holding apparatus with a layered composite electrode device and method for the production thereofASML NETHERLANDS BV·Filed 2020·Granted Nov 22, 2022·2 cites·15 claims
- 0271US11398398B2Electrostatic holding apparatus and method for its productionBERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO·Filed 2019·Granted Jul 26, 2022·2 cites·17 claims
- 0337US12366445B2Measuring apparatus and method for roughness and/or defect measurement on a surfaceASML NETHERLANDS BV·Filed 2022·Granted Jul 22, 2025·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →