Inventor · disambiguated record
Silke Hamm
Also filed as: HAMM SILKE
4 granted patents·3 pending applications·2 citations·filing 2021–2024
58Inventor score
Top patents by PatentIndex Score
7 records- 0188US12068177B2Rapid thermal processing system with cooling systemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2021·Granted Aug 20, 2024·2 cites·11 claims
- 0270US2024379390A1Rapid Thermal Processing System With Cooling SystemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Application pending·0 cites
- 0369US12442078B2Workpiece processing apparatus with gas showerhead assemblyMATTSON TECH INC·Filed 2021·Granted Oct 14, 2025·0 cites·14 claims
- 0469US2025096032A1Support Structure for Thermal Processing SystemsMATTSON TECH INC·Filed 2024·Application pending·0 cites
- 0558US12176241B2Support structure for thermal processing systemsMATTSON TECH INC·Filed 2021·Granted Dec 24, 2024·0 cites·18 claims
- 0658US2025167008A1Gas delivery system for a thermal processing apparatusBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Application pending·0 cites
- 0750US12362194B2Rapid thermal processing system with cooling systemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2021·Granted Jul 15, 2025·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →