Inventor · disambiguated record
Simon Mcclatchie
Also filed as: MCCLATCHIE SIMON
6 granted patents·78 citations·filing 1999–2004
82Inventor score
Top patents by PatentIndex Score
6 records- 0175US6242366B1Methods and apparatus for treating a semiconductor substrateTRIKON EQUIP LTD·Filed 1999·Granted Jun 5, 2001·50 cites·20 claims
- 0266US7129167B1Methods and systems for a stress-free cleaning a surface of a substrateLAM RES CORP·Filed 2004·Granted Oct 31, 2006·10 cites·16 claims
- 0362US6988934B1Method and apparatus of a variable height and controlled fluid flow platen in a chemical mechanical polishing systemLAM RES CORP·Filed 2003·Granted Jan 24, 2006·7 cites·21 claims
- 0456US7040954B1Methods of and apparatus for controlling polishing surface characteristics for chemical mechanical polishingLAM RES CORP·Filed 2004·Granted May 9, 2006·6 cites·21 claims
- 0548US8403727B1Pre-planarization system and methodREDEKER FRED C·Filed 2004·Granted Mar 26, 2013·4 cites·8 claims
- 0642US7040970B2Apparatus and method for distributing a polishing fluidLAM RES CORP·Filed 2004·Granted May 9, 2006·1 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →