Inventor · disambiguated record
Siu Tang Ng
Also filed as: NG SIU TANG
1 granted patent·2 pending applications·2 citations·filing 2011–2014
19Inventor score
Top patents by PatentIndex Score
3 records- 0158US9155184B2Plasma generation source employing dielectric conduit assemblies having removable interfaces and related assemblies and methodsAPPLIED MATERIALS INC·Filed 2014·Granted Oct 6, 2015·2 cites·20 claims
- 0239US2016099162A1Single ring design for high yield, substrate extreme edge defect reduction in icp plasma processing chamberAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 0335US2012094499A1Method of performing an in situ chamber cleanNG SIU TANG·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →