Inventor · disambiguated record
Silvio J. Rabello
Also filed as: RABELLO SILVIO · RABELLO SILVIO J
6 granted patents·2 pending applications·178 citations·filing 2002–2012
83Inventor score
Top patents by PatentIndex Score
8 records- 0196US6992764B1Measuring an alignment target with a single polarization stateNANOMETRICS INC·Filed 2002·Granted Jan 31, 2006·115 cites·24 claims
- 0289US8525993B2Scatterometry measurement of asymmetric structuresRABELLO SILVIO J·Filed 2010·Granted Sep 3, 2013·16 cites·52 claims
- 0387US7508976B1Local process variation correction for overlay measurementNANOMETRIC INC·Filed 2003·Granted Mar 24, 2009·41 cites·17 claims
- 0473US9239523B2Diffraction based overlay linearity testingLI JIE·Filed 2011·Granted Jan 19, 2016·2 cites·20 claims
- 0566US8817273B2Dark field diffraction based overlayJEONG HWAN J·Filed 2012·Granted Aug 26, 2014·2 cites·32 claims
- 0660US8170838B2Simulating two-dimensional periodic patterns using compressed fourier spaceRABELLO SILVIO J·Filed 2009·Granted May 1, 2012·2 cites·34 claims
- 0743US2009296075A1Imaging Diffraction Based OverlayNANOMETRICS INC·Filed 2008·Application pending·0 cites
- 0836US2006187466A1Selecting unit cell configuration for repeating structures in optical metrologyTIMBRE TECH INC·Filed 2005·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Silvio J. Rabello files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →