Inventor · disambiguated record

Siswanto Sutanto

Also filed as: SUTANTO SISWANTO

2 granted patents·221 citations·filing 2003–2003

71Inventor score

Technology areasH10P

Files withNOVELLUS SYSTEMS INC2

Top patents by PatentIndex Score

2 records

0194US7078312B1Method for controlling etch process repeatabilityNOVELLUS SYSTEMS INC·Filed 2003·Granted Jul 18, 2006·163 cites·22 claims
0287US7163896B1Biased H2 etch process in deposition-etch-deposition gap fillNOVELLUS SYSTEMS INC·Filed 2003·Granted Jan 16, 2007·58 cites·20 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →