Inventor · disambiguated record
Simon W. Tam
Also filed as: TAM SIMON · TAM SIMON W
9 granted patents·293 citations·filing 1985–2005
91Inventor score
Files withAPPLIED MATERIALS INC9
Top patents by PatentIndex Score
9 records- 0182US5883778AElectrostatic chuck with fluid flow regulatorAPPLIED MATERIALS INC·Filed 1995·Granted Mar 16, 1999·68 cites·25 claims
- 0279US5421401ACompound clamp ring for semiconductor wafersAPPLIED MATERIALS INC·Filed 1994·Granted Jun 6, 1995·69 cites·8 claims
- 0374US7829243B2Method for plasma etching a chromium layer suitable for photomask fabricationAPPLIED MATERIALS INC·Filed 2005·Granted Nov 9, 2010·4 cites·21 claims
- 0474US4613400AIn-situ photoresist capping process for plasma etchingAPPLIED MATERIALS INC·Filed 1985·Granted Sep 23, 1986·43 cites·20 claims
- 0567US6270621B1Etch chamberAPPLIED MATERIALS INC·Filed 2000·Granted Aug 7, 2001·9 cites·3 claims
- 0665US5671117AElectrostatic chuckAPPLIED MATERIALS INC·Filed 1996·Granted Sep 23, 1997·27 cites·8 claims
- 0762US5634266AMethod of making a dielectric chuckAPPLIED MATERIALS INC·Filed 1995·Granted Jun 3, 1997·23 cites·1 claims
- 0858US5316278AClamping ring apparatus for processing semiconductor wafersAPPLIED MATERIALS INC·Filed 1992·Granted May 31, 1994·29 cites·15 claims
- 0956US6123864AEtch chamberAPPLIED MATERIALS INC·Filed 1994·Granted Sep 26, 2000·21 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →