Inventor · disambiguated record
Sing-Mo Tzeng
Also filed as: TZENG SING-MO · TZENG SING-MO H
4 granted patents·388 citations·filing 1995–1999
83Inventor score
Top patents by PatentIndex Score
4 records- 0190US6309956B1Fabricating low K dielectric interconnect systems by using dummy structures to enhance processINTEL CORP·Filed 1999·Granted Oct 30, 2001·138 cites·6 claims
- 0289US5614444AMethod of using additives with silica-based slurries to enhance selectivity in metal CMPSEMATECH INC·Filed 1995·Granted Mar 25, 1997·133 cites·14 claims
- 0381US5935868AInterconnect structure and method to achieve unlanded vias for low dielectric constant materialsINTEL CORP·Filed 1997·Granted Aug 10, 1999·69 cites·36 claims
- 0474US6037249AMethod for forming air gaps for advanced interconnect systemsINTEL CORP·Filed 1997·Granted Mar 14, 2000·48 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →