Inventor · disambiguated record
Sih-Ling Yeh
Also filed as: YEH SIH-LING
0 granted patents·3 pending applications·0 citations·filing 2023–2024
Technology areasB24B
Files withAPPLIED MATERIALS INC3
Top patents by PatentIndex Score
3 records- 0171US2024342855A1Steam generation for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0268US2024408650A1Method and apparatus to clean substrate with atomizing nozzleAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0366US2024042570A1Cleaning of cmp temperature control systemAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →