Inventor · disambiguated record
Sjoerd Martijn Huiberts
Also filed as: HUIBERTS SJOERD MARTIJN
2 granted patents·1 pending application·3 citations·filing 2013–2024
44Inventor score
Files withASML NETHERLANDS BV3
Top patents by PatentIndex Score
3 records- 0177US12099307B2Actuator unit for positioning an optical elementASML NETHERLANDS BV·Filed 2021·Granted Sep 24, 2024·1 cites·20 claims
- 0273US2024402611A1Actuator unit for positioning an optical elementASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0366US10372045B2Method of calibrating a reluctance actuator assembly, reluctance actuator and lithographic apparatus comprising such reluctance actuatorASML NETHERLANDS BV·Filed 2013·Granted Aug 6, 2019·2 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →