Inventor · disambiguated record
Slobodan Mitrovic
Also filed as: MITROVIC SLOBODAN
7 granted patents·8 pending applications·23 citations·filing 2011–2025
80Inventor score
Files withLAM RES CORP7CALIFORNIA INST OF TECHN5BIOLOGISCHE INSEL LOTHAR MOLL GMBH & CO KG1THE CALIFORNIA INST OF TECH1YU JEN-KAN1
Top patents by PatentIndex Score
15 records- 0188US9595653B2Phononic structures and related devices and methodsCALIFORNIA INST OF TECHN·Filed 2013·Granted Mar 14, 2017·9 cites·11 claims
- 0285US10598644B2Generation and analysis of chemical compound librariesCALIFORNIA INST OF TECHN·Filed 2017·Granted Mar 24, 2020·3 cites·11 claims
- 0385US9645109B2Scanning drop sensorCALIFORNIA INST OF TECHN·Filed 2015·Granted May 9, 2017·4 cites·17 claims
- 0482US9778234B2Generation and analysis of chemical compound librariesCALIFORNIA INST OF TECHN·Filed 2014·Granted Oct 3, 2017·4 cites·14 claims
- 0575US2025263838A1Surface coating for plasma processing chamber componentsLAM RES CORP·Filed 2025·Application pending·0 cites
- 0670US2025069866A1In situ real-time sensing and compensation of non-uniformities in substrate processing systemsLAM RES CORP·Filed 2024·Application pending·0 cites
- 0769US9419198B2Nanomesh phononic structures for low thermal conductivity and thermoelectric energy conversion materialsYU JEN-KAN·Filed 2011·Granted Aug 16, 2016·3 cites·9 claims
- 0866US2021292893A1Surface coating for plasma processing chamber componentsLAM RES CORP·Filed 2019·Application pending·0 cites
- 0955US12142464B2In situ real-time sensing and compensation of non-uniformities in substrate processing systemsLAM RES CORP·Filed 2020·Granted Nov 12, 2024·0 cites·17 claims
- 1047US2017069818A1Fabrication methods for thermoelectric phononic structuresCALIFORNIA INST OF TECHN·Filed 2016·Application pending·0 cites
- 1147US2023274954A1Substrate supports with multilayer structure including coupled heater zones with local thermal controlLAM RES CORP·Filed 2021·Application pending·0 cites
- 1246US2019367745A1Side passivationBIOLOGISCHE INSEL LOTHAR MOLL GMBH & CO KG·Filed 2018·Application pending·0 cites
- 1343US2022246404A1Sealant coating for plasma processing chamber componentsLAM RES CORP·Filed 2020·Application pending·0 cites
- 1441US9593425B2Confinement of reaction components at electrode surfaceTHE CALIFORNIA INST OF TECH·Filed 2015·Granted Mar 14, 2017·0 cites·18 claims
- 1534US2022130705A1Electrostatic chuck with powder coatingLAM RES CORP·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →