Inventor · disambiguated record
Songwhe Herr
Also filed as: HERR SONGWHE
0 granted patents·3 pending applications·0 citations·filing 2024–2024
Files withASM IP HOLDING BV3
Top patents by PatentIndex Score
3 records- 0161US2025166971A1Substrate processing apparatus using plasma phase shiftASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0257US2025043427A1Wafer processing apparatus with auxiliary ground pathsASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0357US2024404790A1Wafer processing apparatus using plasma phase shiftASM IP HOLDING BV·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →