Inventor · disambiguated record
Soundarrajan Jembulingam
Also filed as: JEMBULINGAM SOUNDARRAJAN
5 granted patents·2 pending applications·7 citations·filing 2014–2024
70Inventor score
Files withAPPLIED MATERIALS INC7
Top patents by PatentIndex Score
7 records- 0193US11508563B1Methods and apparatus for processing a substrate using improved shield configurationsAPPLIED MATERIALS INC·Filed 2021·Granted Nov 22, 2022·2 cites·20 claims
- 0276US11621152B2Methods and apparatus for processing a substrate using improved shield configurationsAPPLIED MATERIALS INC·Filed 2022·Granted Apr 4, 2023·0 cites·16 claims
- 0375US11251067B2Pedestal lift for semiconductor processing chambersAPPLIED MATERIALS INC·Filed 2019·Granted Feb 15, 2022·2 cites·21 claims
- 0474US10781518B2Gas cooled electrostatic chuck (ESC) having a gas channel formed therein and coupled to a gas box on both ends of the gas channelAPPLIED MATERIALS INC·Filed 2014·Granted Sep 22, 2020·3 cites·17 claims
- 0570US2025205848A1Polishing head for substrate polishingAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0651US11056372B2Low temperature biasable substrate supportAPPLIED MATERIALS INC·Filed 2019·Granted Jul 6, 2021·0 cites·18 claims
- 0750US2022213590A1Methods and apparatus for processing a substrate using improved shield configurationsAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →