Inventor · disambiguated record
Soichi Katagiri
Also filed as: KATAGIRI SOICHI
14 granted patents·2 pending applications·418 citations·filing 1988–2009
93Inventor score
Top patents by PatentIndex Score
16 records- 0195US7339167B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Mar 4, 2008·29 cites·20 claims
- 0290US5222112AX-ray pattern masking by a reflective reduction projection optical systemHITACHI LTD·Filed 1991·Granted Jun 22, 1993·134 cites·36 claims
- 0389US6099393APolishing method for semiconductors and apparatus thereforHITACHI LTD·Filed 1998·Granted Aug 8, 2000·77 cites·22 claims
- 0487US5420436AMethods for measuring optical system, and method and apparatus for exposure using said measuring methodHITACHI LTD·Filed 1993·Granted May 30, 1995·61 cites·14 claims
- 0579US5408320AWorkpiece having alignment marks for positioning a pattern at a different pitch to be formed thereon, and method for fabricating the sameHITACHI LTD·Filed 1992·Granted Apr 18, 1995·29 cites·14 claims
- 0674US4857744AOptical projection printing apparatus wherein wafer mark has a grating pitch in the sagittal plane of the first optical systemHITACHI LTD·Filed 1988·Granted Aug 15, 1989·22 cites·12 claims
- 0773US7238939B2Small electron gunHITACHI HIGH TECH CORP·Filed 2004·Granted Jul 3, 2007·7 cites·18 claims
- 0862US5200798AMethod of position detection and the method and apparatus of printing patterns by use of the position detection methodHITACHI LTD·Filed 1991·Granted Apr 6, 1993·14 cites·25 claims
- 0961US5331369AMethod of forming patterns and apparatus for carrying out the sameHITACHI LTD·Filed 1992·Granted Jul 19, 1994·37 cites·9 claims
- 1058US2007236143A1Small electron gunHITACHI HIGH TECH CORP·Filed 2007·Application pending·0 cites
- 1157US8232712B2Small electron gunKATAGIRI SOICHI·Filed 2009·Granted Jul 31, 2012·0 cites·6 claims
- 1246US6849542B2Method for manufacturing a semiconductor device that includes planarizing with a grindstone that contains fixed abrasivesHITACHI LTD·Filed 2002·Granted Feb 1, 2005·2 cites·17 claims
- 1342US7166013B2Polishing apparatus and method for producing semiconductors using the apparatusHITACHI LTD·Filed 2004·Granted Jan 23, 2007·1 cites·6 claims
- 1440US7137866B2Polishing apparatus and method for producing semiconductors using the apparatusHITACHI LTD·Filed 2005·Granted Nov 21, 2006·0 cites·4 claims
- 1535US2003199238A1Polishing apparatus and method for producing semiconductors using the apparatusFiled 2002·Application pending·0 cites
- 1634US5164789AMethod and apparatus for measuring minute displacement by subject light diffracted and reflected from a grating to heterodyne interferenceHITACHI LTD·Filed 1991·Granted Nov 17, 1992·5 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →