Inventor · disambiguated record
Souichi Nishijima
Also filed as: NISHIJIMA SOUICHI
0 granted patents·2 pending applications·0 citations·filing 2009–2017
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0149US2011264250A1Substrate processing system, substrate processing method and storage medium storing programTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0247US2018127880A1Microwave plasma source and microwave plasma processing apparatusTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →