Inventor · disambiguated record
So Osada
Also filed as: OSADA SO
1 granted patent·4 pending applications·0 citations·filing 2022–2025
13Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0163US2025232988A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0259US12300518B2Substrate processing apparatus and substrate processing method having enhanced configuration of replenishing processing liquidTOKYO ELECTRON LTD·Filed 2022·Granted May 13, 2025·0 cites·8 claims
- 0350US2025130597A1Liquid supply device, liquid supply method, and storage mediumTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0448US2025132171A1Liquid supply device, liquid supply method, and storage mediumTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0547US2025246449A1Liquid supply system, liquid processing apparatus, and liquid supply methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →