Inventor · disambiguated record
Son M. Phi
Also filed as: PHI SON · PHI SON M
5 granted patents·2 pending applications·35 citations·filing 1999–2023
77Inventor score
Top patents by PatentIndex Score
7 records- 0193US11594428B2Low temperature chuck for plasma processing systemsAPPLIED MATERIALS INC·Filed 2017·Granted Feb 28, 2023·9 cites·16 claims
- 0277US12009228B2Low temperature chuck for plasma processing systemsAPPLIED MATERIALS INC·Filed 2023·Granted Jun 11, 2024·0 cites·19 claims
- 0376US11533783B2Multi-zone heater model-based control in semiconductor manufacturingAPPLIED MATERIALS INC·Filed 2019·Granted Dec 20, 2022·3 cites·18 claims
- 0460US6822185B2Temperature controlled dome-coil system for high power inductively coupled plasma systemsAPPLIED MATERIALS INC·Filed 2002·Granted Nov 23, 2004·7 cites·56 claims
- 0556US6246203B1Direct skew control and interlock of gantrySILICON VALLEY GROUP·Filed 1999·Granted Jun 12, 2001·16 cites·46 claims
- 0648US2016225652A1Low temperature chuck for plasma processing systemsAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
- 0736US2012074126A1Wafer profile modification through hot/cold temperature zones on pedestal for semiconductor manufacturing equipmentBANG WON B·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →