Inventor · disambiguated record
Sophie Thibaut
Also filed as: THIBAUT SOPHIE
5 granted patents·2 pending applications·351 citations·filing 2017–2023
77Inventor score
Top patents by PatentIndex Score
7 records- 0197US10354873B2Organic mandrel protection processTOKYO ELECTRON LTD·Filed 2017·Granted Jul 16, 2019·340 cites·20 claims
- 0293US10727057B2Platform and method of operating for integrated end-to-end self-aligned multi-patterning processTOKYO ELECTRON LTD·Filed 2019·Granted Jul 28, 2020·10 cites·20 claims
- 0371US10748769B2Methods and systems for patterning of low aspect ratio stacksTOKYO ELECTRON LTD·Filed 2019·Granted Aug 18, 2020·1 cites·20 claims
- 0455US11398379B2Platform and method of operating for integrated end-to-end self-aligned multi-patterning processTOKYO ELECTRON LTD·Filed 2019·Granted Jul 26, 2022·0 cites·19 claims
- 0555US2025079174A1Method for processing a substrateTOKYO ELECTION LTD·Filed 2023·Application pending·0 cites
- 0652US12211911B2Recessed contact structures and methodsTOKYO ELECTRON LTD·Filed 2021·Granted Jan 28, 2025·0 cites·20 claims
- 0738US2018323061A1Self-Aligned Triple Patterning Process Utilizing Organic SpacersTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →