Inventor · disambiguated record
Soon Yuh
Also filed as: YUH SOON K
2 granted patents·4 pending applications·21 citations·filing 2000–2003
58Inventor score
Top patents by PatentIndex Score
6 records- 0171US6761770B2Atmospheric pressure wafer processing reactor having an internal pressure control system and methodAVIZA TECH INC·Filed 2002·Granted Jul 13, 2004·18 cites·32 claims
- 0245US6576060B1Protective gas shield apparatusASML US INC·Filed 2000·Granted Jun 10, 2003·3 cites·8 claims
- 0338US2002192377A1Gas distribution systemFiled 2002·Application pending·0 cites
- 0436US2001047756A1Gas distribution systemFiled 2000·Application pending·0 cites
- 0534US2003061991A1Protective shield and system for gas distributionASML US INC·Filed 2002·Application pending·0 cites
- 0630US2004018735A1Method of depositing an oxide film by chemical vapor depositionFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →