Inventor · disambiguated record
Spencer Rich
Also filed as: Rich Spencer
2 granted patents·4 citations·filing 2016–2020
40Inventor score
Files withASML NETHERLANDS BV2
Top patents by PatentIndex Score
2 records- 0183US9755396B1EUV LPP source with improved dose control by combining pulse modulation and pulse control modeASML NETHERLANDS BV·Filed 2016·Granted Sep 5, 2017·4 cites·19 claims
- 0257US12085862B2Laser system for source material conditioning in an EUV light sourceASML NETHERLANDS BV·Filed 2020·Granted Sep 10, 2024·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →