Inventor · disambiguated record
Sriharsha Jayanti
Also filed as: JAYANTI SRIHARSHA
1 granted patent·4 pending applications·1 citations·filing 2017–2023
16Inventor score
Files withLAM RES CORP5
Top patents by PatentIndex Score
5 records- 0162US10546756B2Method for generating vertical profiles in organic layer etchesLAM RES CORP·Filed 2017·Granted Jan 28, 2020·1 cites·19 claims
- 0251US2025166967A1Systems and methods for reducing variability in features of a substrateLAM RES CORP·Filed 2022·Application pending·0 cites
- 0350US2025308919A1Simultaneous dielectric etch with metal passivationLAM RES CORP·Filed 2023·Application pending·0 cites
- 0449US2025087456A1High selectivity and uniform dielectric etchLAM RES CORP·Filed 2023·Application pending·0 cites
- 0548US2025054769A1Method for reducing variations in mask topographyLAM RES CORP·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →