Inventor · disambiguated record
Sreeram Sonti
Also filed as: SONTI SREERAM
1 granted patent·3 pending applications·0 citations·filing 2020–2024
13Inventor score
Technology areasH10P
Files withLAM RES CORP4
Top patents by PatentIndex Score
4 records- 0156US2024312768A1Process cooling-water isolationLAM RES CORP·Filed 2024·Application pending·0 cites
- 0245US2024030028A1High selectivity, low stress, and low hydrogen carbon hardmasks in low-pressure conditions with wide gap electrode spacingLAM RES CORP·Filed 2021·Application pending·0 cites
- 0343US12002658B2Process cooling-water isolationLAM RES CORP·Filed 2020·Granted Jun 4, 2024·0 cites·19 claims
- 0441US2025022696A1Apparatuses and techniques for cleaning a multi-station semiconductor processing chamberLAM RES CORP·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →